Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing

Beilstein Journal of Nanotechnology

article

Christian Preischl¹  Linh Hoang Le²  Elif Bilgilisoy¹  Armin Gölzhäuser²  Hubertus Marbach¹ 

[1] Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg;Fakultät für Physik, Universität Bielefeld

关键词: 2D materials;    carbon nanomembranes (CNMs);    focused electronbeam-induced processing;    metallic nanostructures;    self-assembledmonolayers;   

DOI  :  10.3762/bjnano.12.26

学科分类：环境监测和分析

来源: Beilstein - Institut zur Foerderung der Chemischen Wissenschaften

【 摘 要 】

Focused electron beam-induced processing is a versatile method for the fabrication of metallic nanostructures with arbitrary shape,in particular, on top of two-dimensional (2D) organic materials, such as self-assembled monolayers (SAMs). Two methods, namelyelectron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) are studied with the precursorsFe(CO)5 and Co(CO)3NO on SAMs of 1,1′,4′,1′′-terphenyl-4-thiol (TPT). For Co(CO)3NO only EBID leads to deposits consistingof cobalt oxide. In the case of Fe(CO)5 EBID and EBISA yield deposits consisting of iron nanocrystals with high purity. Remarkably, the EBISA process exhibits a strong time dependence, which is analyzed in detail for different electron doses. This time dependence is a new phenomenon, which, to the best of our knowledge, was not reported before. The electron-induced cross-linkingof the SAM caused by the cleavage of C–H bonds and the subsequent formation of new C–C bonds between neighboring molecules also seems to play a crucial role in the EBISA process. Previous studies showed that iron nanostructures fabricated on top of across-linked SAM on Au/mica can be transferred to solid substrates and grids without any changes, aside from oxidation. Here wedemonstrate that iron as well as cobalt oxide structures on top of a cross-linked SAM on Ag/mica do change more significantly. TheFe(NO3)3 solution used for etching of the Ag layer also dissolves the cobalt oxide structures and causes dissolution and reduction ofthe iron structures. These results demonstrate that the fabrication of hybrids of metallic nanostructures onto organic 2D materials isan intrinsically complex procedure. The interactions among the metallic deposits, the substrate for the growth of the SAM, and theassociated etching/dissolving agent need to be considered and further studied.

【 授权许可】

CC BY