Design of Piezoelectric PZT Cantilever for Actuator Application

Sensors & Transducers

Dhananjay BODAS¹  Abhay B. JOSHI²  S. A. GANGAL² 

[1] Agharkar Research Institute, GG Agarkar road, Pune 411 004 India;Department of Electronic Science, University of Pune, Pune 411 007 India;

关键词: PZT;    Actuators;   

DOI  :  

来源: DOAJ

【 摘 要 】

Piezoelectric MEMS cantilever is used as a basic element in sensing and actuation. This paper proposes a structural design of MEMS cantilever for actuator application based on bulk MEMS micromachining technique. The structure consists of a silicon dioxide cantilever with an attached piezoelectric layer. The cantilever is designed using analytical modeling and simulation tool: CoventorWare2009. Analytical and simulation results demonstrate deflection of 5.9 µm/V and 2.9 µm/V respectively with a resonant frequency of 23 kHz. Obtained results are discussed and compared with the reported data.

【 授权许可】

Unknown