Resistance of Hydrogenated Titanium-Doped Diamond-Like Carbon Film to Hyperthermal Atomic Oxygen

Metals

Hidetoshi Saitoh¹  Keiji Komatsu¹  Masahito Tagawa²  Kumiko Yokota²  Yuichi Furuyama³  Minami Endo⁴  Hiroki Takamatsu⁴  Masahito Niibe⁴  Kazuhiro Kanda⁴  Kengo Kidena⁴ 

[1] Department of Materials Science and Technology, Nagaoka University of Technology, Kamitomioka Nagaoka 940-2188, Japan;Faculty of Engineering, Kobe University, Nada Kobe 657-8501, Japan;Faculty of Maritime Sciences, Kobe University, Higashi-Nada Kobe 658-0022, Japan;Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto Kamigori 678-1205, Japan;

关键词: titanium-doped diamond-like carbon film;    solid lubricant;    hyperthermal atomic-oxygen beam;    Rutherford backscattering spectrometry;    elastic-recoil detection analysis;    X-ray photoelectron spectroscopy;    near-edge X-ray-absorption fine structure;    glow-discharge optical-emission spectroscopy;   

DOI  :  10.3390/met5041957

来源: DOAJ

【 摘 要 】

The effect of irradiation by a hyperthermal-atomic-oxygen beam on hydrogenated titanium-doped diamond-like carbon (hydrogenated Ti-DLC) films, applied as a solid lubricant for equipment used in low-earth orbit was investigated. Unlike the film thickness of hydrogenated non-doped DLC films, that of hydrogenated Ti-DLC films was found to be constant after the films were exposed to atomic oxygen. In addition, bulk composition of the hydrogenated Ti-DLC film stayed constant, and in particular, hydrogen content in the film did not decrease. These results indicate that a hydrogenated Ti-DLC film can keep its low friction properties under vacuum. Surface chemical analysis showed that a titanium-oxide layer is form on the film by exposure to atomic oxygen. The thickness of the titanium oxide layer was estimated to be about 5 nm from the element distribution in the depth direction of the hydrogenated Ti-DLC films. The titanium-oxide layer was interpreted to protect the bulk film from erosion by hyperthermal atomic oxygen.

【 授权许可】

Unknown