Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Micromachines

Panliang Tang¹  Jiahe Dong¹  Jinyi Ma¹  Yanguang Chen¹  Zhenglin Chen¹  Xiangyong Zhao²  Qiaozhen Zhang²  Sulei Fu³  Haodong Wu⁴ 

[1] China Electronics Technology Group Corporation No.26 Research Institute (SIPAT), Chongqing 400060, China;College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China;Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China;Key Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, China;

关键词: SAW resonator;    partial differential equations;    finite element method;    COMSOL multiphysics;   

DOI  :  10.3390/mi12020141

来源: DOAJ

【 摘 要 】

Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

【 授权许可】

Unknown