Round robin comparison study on the form measurement of optical freeform surfaces

Journal of the European Optical Society-Rapid Publications

Antonia Harsch¹  Rolf Beisswanger¹  Jens Siepmann²  Yohan Kondo³  Youichi Bitou³  Reyko Schachtschneider⁴  Clemens Elster⁴  Ines Fortmeier⁴  Michael Schulz⁴  Vit Ledl⁵  Ondrej Matousek⁵ 

[1] Institut für Technische Optik, Universtiät Stuttgart;Mahr GmbH;National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ);Physikalisch-Technische Bundesanstalt (PTB);Regional Centre for Special Optics and Optoelectronic Systems (TOPTEC) Institute of Plasma Physics of the Czech Academy of Sciences;

关键词: Freeform optical surfaces;    Metrology;    Interlaboratory comparison;   

DOI  :  10.1186/s41476-019-0124-1

来源: DOAJ

【 摘 要 】

Abstract A round robin comparison of freeform form measurements was carried out by the project partners and stakeholders of a European metrology research project. Altogether six measuring instruments were considered: five different (pointwise and areal) optical devices and one tactile device. Three optical freeform surfaces were used for the comparison measurements, where two specimens were measured by five instruments and one specimen by four instruments. In this paper, the evaluation methods and results of this round robin are presented for the three freeform surfaces made from a temperature-stable material, Super Invar ®. The freeforms had diameters of 40 mm, 50 mm and 100 mm and best-fit radii of 39.75 mm (convex), 40.9 mm (convex) and 423.5 mm (concave). For comparison, the bilateral pointwise differences between the available measurements were calculated. The root-mean-square values of these differences ranged from 15 nm to 110 nm (neglecting spherical contributions) and provided an insight into the status of typical freeform measurement capabilities for optical surfaces.

【 授权许可】

Unknown