Efficient Fabrication Process of Ordered Metal Nanodot Arrays for Infrared Plasmonic Sensor

Micromachines

Masahiko Yoshino¹  Yuki Nakagawa¹  Yusuke Kubota¹  Motoki Terano² 

[1] Mechanical Engineering, School of Engineering, Tokyo Institute of Technology, Tokyo 152-8550, Japan;Mechanical Systems Engineering, Faculty of Engineering, Okayama University of Science, Okayama 700-0005, Japan;

关键词: nanomaterials;    plasmonics;    nanodot array;    thermal dewetting;    absorbance spectrum;    infrared plasmonic sensor;   

DOI  :  10.3390/mi10060385

来源: DOAJ

【 摘 要 】

In this paper, a simple process to fabricate ordered Au nanodot arrays up to 520 nm in diameter that respond to infrared light is developed, and the feasibility of its application to infrared plasmonic sensors is shown. The developed process utilizes thermal dewetting to agglomerate a coated gold film into nanodots. It was difficult to produce large nanodots that responded to infrared light owing to dot separation. In this paper, therefore, the mechanism of dot agglomeration by thermal dewetting is studied via an experiment and theoretical model, and conditions to form single nanodots are clarified. Furthermore, Au nanodot arrays of 100 nm to 520 nm in diameter were fabricated by this process, and their absorption spectra were analyzed. In addition, an analysis of the change in the peak wavelength against the refractive index indicates the possibility of further improvement of the sensitivity of the infrared plasmon sensors.

【 授权许可】

Unknown