Parylene C as a versatile dielectric material for organic field-effect transistors

Beilstein Journal of Nanotechnology

Jacek Ulanski¹  Maciej Gazicki-Lipman²  Tomasz Marszalek³ 

[1] Department of Molecular Physics, Lodz University of Technology, Zeromskiego 116, 90-924 Lodz, Poland;Institute for Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1-15, 90-924 Lodz, Poland;Organisch-Chemisches Institut, Ruprecht-Karls-Universität Heidelberg, 69120, Heidelberg, Germany;

关键词: dielectric;    encapsulation layer;    flexible substrate;    organic field effect transistor;    Parylene C;   

DOI  :  10.3762/bjnano.8.155

来源: DOAJ

【 摘 要 】

An emerging new technology, organic electronics, is approaching the stage of large-scale industrial application. This is due to a remarkable progress in synthesis of a variety of organic semiconductors, allowing one to design and to fabricate, so far on a laboratory scale, different organic electronic devices of satisfactory performance. However, a complete technology requires upgrading of fabrication procedures of all elements of electronic devices and circuits, which not only comprise active layers, but also electrodes, dielectrics, insulators, substrates and protecting/encapsulating coatings. In this review, poly(chloro-para-xylylene) known as Parylene C, which appears to become a versatile supporting material especially suitable for applications in flexible organic electronics, is presented. A synthesis and basic properties of Parylene C are described, followed by several examples of use of parylenes as substrates, dielectrics, insulators, or protecting materials in the construction of organic field-effect transistors.

【 授权许可】

Unknown