A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Processes

Liam Y. Hsieh¹  Tsung-Ju Hsieh² 

[1] Department of Systems Engineering and Operations Research, George Mason University, Fairfax, VA 22030, USA;GiantSoft, Hsinchu 300, Taiwan;

关键词: wafer per hour (WPH);    data analysis;    capacity management;    semiconductor manufacturing;   

DOI  :  10.3390/pr6020016

来源: DOAJ

【 摘 要 】

Equipment throughput is one of the most critical parameters for production planning and scheduling, which is often derived by optimization techniques to achieve business goals. However, in semiconductor manufacturing, up-to-date and reliable equipment throughput is not easy to estimate and maintain because of the high complexity and extreme amount of data in the production systems. This article concerns the development and implementation of a throughput management system tailored for a semiconductor wafer fabrication plant (Fab). A brief overview of the semiconductor manufacturing and an introduction of the case Fab are presented first. Then, we focus on the system architecture and some concepts of crucial modules. This study also describes the project timescales and difficulties and discusses both tangible and intangible benefits from this project.

【 授权许可】

Unknown