Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

Sensors

卷:19

Edmund Koch¹  Christopher Taudt²  Peter Hartmann²  Bryan Nelsen²  Elisabeth Rossegger³  Sandra Schlögl³ 

[1] Faculty of Electrical and Computer Engineering, Technical University Dresden, D-01307 Dresden, Germany;

[2] Faculty of Physical Engineering/Computer Sciences, University of Applied Sciences Zwickau, D-08056 Zwickau, Germany;

[3] Polymer Competence Center Leoben, AT-8700 Leoben, Austria;

关键词: interferometry;    cross-linking characterization;    white-light interferometry;    dispersion-enhanced low-coherence interferometry;    photoresist;    semiconductor manufacturing;   

DOI  :  10.3390/s19051152

来源: DOAJ

【 摘 要 】

A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10−6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.

【 授权许可】

Unknown