Fast Cross-Linking-Characterization of Waveguide-Polymers on Wafers by Imaging Low-Coherence Interferometry

Proceedings

Hartmann, Peter¹  Nelsen, Bryan²  Schlögl, Sandra³  Taudt, Christopher⁴  Koch, Edmund⁵ 

[1] Author to whom correspondence should be addressed.;Fraunhofer Application Center for Optical Metrology and Surface Technologies AZOM, D-08056 Zwickau,Germany;Medizinische Fakultät Carl Gustav Carus, Technische Universität Dresden, D-01307 Dresden, Germany;Optical Technologies Group, University of Applied Sciences Zwickau, D-08056 Zwickau, Germany;Polymer Competence Center Leoben, AT-8700 Leoben, Austria

关键词: interferometry;    cross-linking characterization;    white-light interferometry;    dispersionenhanced low-coherence interferometry;    photoresist;    semiconductor manufacturing;   

DOI  :  10.3390/proceedings2131046

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This work introduces a novel method to characterize cross-linking differences in spincast polymers for waveguide applications. The method is based on a low-coherence interferometer which utilizes an imaging spectrometer to gather spatially resolved data along a line without the need for scanning. The cross-linking characterization is performed by the determination of the wavelength-dependent optical thickness. In order to do this, an algorithm to analyze the wrapped phase data and extract refractive index information is developed. Finally, the approach is tested on photo-lithographically produced samples with lateral refractive index differences in pitches of 50 μm.

【 授权许可】

CC BY