Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

Materials

Stepan Vorotilo¹  Pavel Loginov¹  Alina Sytchenko¹  Evgeny Levashov¹  Yuriy Pogozhev¹  Philipp Kiryukhantsev-Korneev¹  Anton Orekhov¹ 

[1] Scientific-Educational Center of SHS, National University of Science and Technology “MISiS”, 119049 Moscow, Russia;

关键词: magnetron sputtering;    coating;    ZrB₂;    MoSi₂;    Zr-Mo-Si-B-(N);    structure;   

DOI  :  10.3390/ma14081932

来源: DOAJ

【 摘 要 】

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB₂-MoSi₂ targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO₂ + ZrO₂)/SiO₂ oxide layer, which inhibits the diffusion of oxygen into the coating.

【 授权许可】

Unknown