期刊论文详细信息
| Open Physics | |
| Germanium segregation in CVD grown SiGe layers | |
| Gaiduk Peter1  Novikau Andrei1  | |
| [1] Belarusian State University, prosp. Nezavisimosti, 4, 220030, Minsk, Belarus; | |
| 关键词: sige oxidation; ge nanocluster; floating gate; mos capacitor; 61.46.+w; 64.75.lm; 81.07.-b; 81.07.bc; | |
| DOI : 10.2478/s11534-009-0082-0 | |
| 来源: DOAJ | |
【 授权许可】
Unknown