期刊论文详细信息
Open Physics
Germanium segregation in CVD grown SiGe layers
Gaiduk Peter1  Novikau Andrei1 
[1] Belarusian State University, prosp. Nezavisimosti, 4, 220030, Minsk, Belarus;
关键词: sige oxidation;    ge nanocluster;    floating gate;    mos capacitor;    61.46.+w;    64.75.lm;    81.07.-b;    81.07.bc;   
DOI  :  10.2478/s11534-009-0082-0
来源: DOAJ
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