Energy-Delay Sensitivity Analysis of a Nanoelectromechanical Relay With the Negative Capacitance of a Ferroelectric Capacitor

IEEE Journal of the Electron Devices Society

Changhwan Shin¹  Chankeun Yoon¹  Gihun Choe² 

[1] Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea;School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA;

关键词: Energy-delay sensitivity;    ferroelectric capacitor;    nanoelectromechanical relay;    negative capacitance;   

DOI  :  10.1109/JEDS.2020.2983197

来源: DOAJ

【 摘 要 】

The energy-delay sensitivity of a nanoelectromechanical (NEM) relay and an NEM relay with the negative capacitance of a ferroelectric capacitor (NC + NEM relay) are theoretically investigated. The energy-delay characteristics of the NC + NEM relay deteriorate compared to those of the NEM relay when its movable beam becomes shorter/thicker than the critical beam length/thickness. The energy-delay characteristics of the NC + NEM relay (vs. the NEM relay) can be improved by increasing/decreasing the movable beam length/thickness. However, the maximum length and minimum thickness of the movable electrode are specified. This is necessary to avoid stuck-on failure. This study provides guidelines for improving the switching energy-delay characteristics and the operating voltage of the NC + NEM relay (vs. the NEM relay) by optimizing the device design variables.

【 授权许可】

Unknown