New Type Small-angle Sensor Based on the TIR and SPR Theories in Heterodyne Interferomery

Sensors & Transducers

Shinn-Fwu Wang¹  Lung-Hsiang Lee¹  Jyh-Shyan Chiu¹  Rong-Moo Hong¹  Cheng-Min Lee¹ 

[1] Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.;

关键词: Total internal reflection (TIR);    Surface plasmon resonance (SPR);    Kretchmann’s configuration;    Heterodyne interferometry (HI);    Small-angle measurement;   

DOI  :  

来源: DOAJ

【 摘 要 】

In this paper, a new type small-angle sensor based on the total internal reflection (TIR) and surface plasmon resonance (SPR) theories in heterodyne interferomery is proposed. With the small-displacement sensor, a small rotation angle can be obtained only by measuring the variation in phase difference between s- and p-polarization states. The best theoretical sensitivity of the small-angle sensor is 2x10-4 degree/degree. And its resolution can reach 1x10-7 radian. The sensor has some merits, e.g., a simple optical setup, high resolution, high sensitivity, rapid measurement.

【 授权许可】

Unknown