A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry

Sensors

关键词: Total internal reflection (TIR);    surface plasmon resonance (SPR);    heterodyne interferometry (HI);    small-displacement sensor;   

DOI  :  10.3390/s90402498

来源: mdpi

【 摘 要 】

A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.

【 授权许可】

CC BY   
© 2009 by the authors; licensee MDPI, Basel, Switzerland