Fully Depleted Monolithic Active Microstrip Sensors: TCAD Simulation Study of an Innovative Design Concept

Sensors

Lorenzo De Cilladi¹  Thomas Corradino²  Gian-Franco Dalla Betta²  Lucio Pancheri²  Coralie Neubüser³ 

[1] Dipartimento di Fisica, Università degli Studi di Torino, 10125 Torino, Italy;Dipartimento di Ingegneria Industriale, Università degli Studi di Trento, 38123 Trento, Italy;Trento Institute for Fundamental Physics and Applications—Istituto Nazionale di Fisica Nucleare (TIFPA-INFN), 38123 Trento, Italy;

关键词: particle detectors;    silicon detectors;    monolithic sensors;    microstrip sensors;    CMOS;    TCAD simulations;   

DOI  :  10.3390/s21061990

来源: DOAJ

【 摘 要 】

The paper presents the simulation studies of 10 μμ$\mathsf{\mu }$m pitch microstrips on a fully depleted monolithic active CMOS technology and describes their potential to provide a new and cost-effective solution for particle tracking and timing applications. The Fully Depleted Monolithic Active Microstrip Sensors (FD-MAMS) described in this work, which are developed within the framework of the ARCADIA project, are compliant with commercial CMOS fabrication processes. A set of Technology Computer-Aided Design (TCAD) parametric simulations was performed in the perspective of an upcoming engineering production run with the aim of designing FD-MAMS, studying their electrical characteristics, and optimizing the sensor layout for enhanced performance in terms of low capacitance, fast charge collection, and low-power operation. A fine pitch of 10 μμ$\mathsf{\mu }$m was chosen to provide high spatial resolution. This small pitch still allows readout electronics to be monolithically integrated in the inter-strip regions, enabling the segmentation of long strips and the implementation of distributed readout architectures. The effects of surface radiation damage expected for total ionizing doses of the order of 10 to 10${}^5$ krad were also modeled in the simulations. The results of the simulations exhibit promising performance in terms of timing and low power consumption and motivate R&D efforts to further develop FD-MAMS; the results will be experimentally verified through measurements on the test structures that will be available from mid-2021.

【 授权许可】

Unknown