Effects of Heating Mode and Temperature on the Microstructures, Electrical and Optical Properties of Molybdenum Thin Films

Materials

Douqin Ma¹  Yanfang Chen²  Jingpei Xie²  Tingting Liang²  Aiqin Wang²  Haili Zhao³  Aixia Mao³ 

[1] Collaborative Innovation Center of Nonferrous Metals, Henan University of Science and Technology, Luoyang 471003, China;School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471023, China;School of Physical Engineering, Zhengzhou University, Zhengzhou 450052, China;

关键词: CIGS thin film solar cells;    Mo thin films;    magnetron sputtering;    heating mode;    temperature;   

DOI  :  10.3390/ma11091634

来源: DOAJ

【 摘 要 】

In this paper, molybdenum (Mo) thin films are deposited on soda-lime glass (SLG) substrates by direct current magnetron sputtering and heated in three different modes at different temperatures, including substrate heating, annealing treatment, and both substrate heating and annealing treatment. The effects of heating temperature and heating mode on the structures, morphology, optical and electrical properties of Mo thin films were systematically investigated by X-ray diffraction (XRD), Scanning electron microscopy (SEM), atomic force microscope (AFM) and UV-visible spectrophotometer (UV-vis spectra). It is shown that as the substrate and annealing temperature increase, the crystallinity of Mo thin films is improved, and the grain sizes become bigger. Especially in the mode of both substrate heating and annealing treatment at higher temperature, the obtained Mo thin films show higher crystallinity and conductivity. Moreover, with the increase of substrate and annealing temperature in different heating modes, both the surface compactness of Mo films and the optical reflectance increase correspondingly. Furthermore, the Mo film, prepared at the substrate heating temperature of 400 °C and annealed at 400 °C, showed excellent comprehensive performance, and the resistivity is as low as 1.36 × 10−5 Ω·cm. Using this optimized Mo thin film as an electrode, copper indium gallium selenium (CIGS) solar cells have a maximum photo-conversion efficiency of 12.8%.

【 授权许可】

Unknown