A Micromechanical Sensor of Temperature Based on Surface Plasmons Resonance

Sensors & Transducers

Karl FLEURY-FRENETTE¹  Juriy HASTANIN²  Serge HABRAKEN²  Yvon RENOTTE² 

[1] Centre Spatial de Liège, Liège, Angleur, Belgium, B-4031;Université de Liège, Physics Department, HoloLab, Liège, Belgium, B-4000;

关键词: surface plasmons;    cantilever sensing;    MOEMS;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper reports a new concept of micromechanical sensors of temperature. The sensors consist of a micro-cantilever transducer and optical readout means for monitoring cantilever mechanical response using the surface plasmons resonance (SPR) phenomenon. This solution has the advantage of reducing the cantilever length due to an ultrahigh resolution of the optical readout means and, therefore a high signal-to-noise ratio can be achieved.

【 授权许可】

Unknown