MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Micromachines

Haoran Wang¹  Huabei Jiang²  Hao Yang²  Huikai Xie³  Yifei Ma³  Yingtao Ding³ 

[1] Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA;Department of Medical Engineering, University of South Florida, Tampa, FL 33620, USA;School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China;

关键词: microelectromechanical systems;    MEMS;    ultrasound transducers;    cMUT;    pMUT;    photoacoustic imaging;   

DOI  :  10.3390/mi11100928

来源: DOAJ

【 摘 要 】

Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

【 授权许可】

Unknown