Effects of isopropyl alcohol and acetic acid on surface roughness of Z-cut quartz etched by ammonium bifluoride solution

Micro & nano letters

article

Zhaoyun Zhang¹  Wei Su¹  Bin Tang¹  Wei Xu¹  Zhuang Xiong¹  Yang Gao¹  Bo Peng¹ 

[1] Institute of Electronic Engineering, China Academy of Engineering Physics

关键词: surface roughness;    ammonium compounds;    etching;    quartz;    surface morphology;    scanning electron microscopy;    isopropyl alcohol;    acetic acid;    surface roughness;    Z-cut quartz etching;    ammonium bifluoride solution;    microelectromechanical systems;    MEMS;    wet etching;    surface property;    silicon wet etching;    morphology;    scanning electron microscopy;    surface prohlometry;   

DOI  :  10.1049/mnl.2017.0089

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Protein S is a vitamin K dependent co-factor of protein C. Deficiency of Protein C and S results in a hypercoagulable state, which is treated with anticoagulation. This is the first report of a patient with combined protein C and S deficiency, who underwent a Cesarean section under spinal anesthesia in KRL Hospital Islamabad (Pakistan).

【 授权许可】

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