Surface electrode configurations for quartz MEMS double-ended tuning fork resonator

Micro & nano letters

article

Jinxing Liang¹  Yanli Chai²  Guangchan Meng¹  Xueying Chen¹ 

[1] Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University;School of Electrical Engineering and Automation, Jiangsu Normal University

关键词: crystal resonators;    electrodes;    etching;    micromechanical resonators;    quartz;    vibrations;    surface electrode configurations;    quartz MEMS double-ended tuning fork resonator;    longitudinal force;    sensing element;    accelerometer;    force sensor;    pressure sensor;    in-plane antiphase flexural mode vibration;    oscillation;    internal strains;    AC voltages;    double-ended tuning fork vibration modes;    double-ended tuning fork vibration characteristics;    electromechanical coupling efficiency;    electrode pattern effect;    vibration performances;    wet etching-based quartz MEMS technique;    equivalent parameters;    impedance analyser;    pattern location;    pattern widths;    quartz double-ended tuning fork based devices;    frequency 65 kHz;    current 4294 A;    SiO2;   

DOI  :  10.1049/mnl.2012.0621

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Skills gap is a common problem between university products and industry needs. This is apparent in many, if not all of the areas. The gap plays a role in the productivity or development of a given industry, as well as the unemployed rates. In a competitive world, employers are always looking for the best candidates for employment, with the best being defined as being competent both technically and professionally. We contend that competency based curriculum can provide a means to narrow and even close the skills gap. In this paper, we present a Competency Based Curriculum Model that can be used as a guide to develop a competency based curriculum. This model will be employed to develop a competency based curriculum for IT Security Engineers.

【 授权许可】

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