期刊论文详细信息
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Thick layers liquid-phase epitaxy method
关键词: epitaxy;    solution;    melt;    diffusion;    layer;    concentration;   
DOI  :  
来源: DOAJ
【 摘 要 】

On the basis of the authors' model of mass transfer, a new method for thick layers epitaxy has been developed. The method provides for the growth of different parts of the layers in two-layer systems obtained from the solution-melt and allows to control the thickness of substrate submelting and the thickness of layers obtained at the upper and lower substrates, in consideration of different crystallized substance transport mechanisms.

【 授权许可】

Unknown   

  文献评价指标  
  下载次数:0次 浏览次数:0次