Thick layers liquid-phase epitaxy method

Tekhnologiya i Konstruirovanie v Elektronnoi Apparature

关键词: epitaxy;    solution;    melt;    diffusion;    layer;    concentration;   

DOI  :  

来源: DOAJ

【 摘 要 】

On the basis of the authors' model of mass transfer, a new method for thick layers epitaxy has been developed. The method provides for the growth of different parts of the layers in two-layer systems obtained from the solution-melt and allows to control the thickness of substrate submelting and the thickness of layers obtained at the upper and lower substrates, in consideration of different crystallized substance transport mechanisms.

【 授权许可】

Unknown