Low-Thermal-Budget Photonic Sintering of Hybrid Pastes Containing Submicron/Nano CuO/Cu2O Particles

Nanomaterials

Jenn-Ming Song¹  Wei-Han Cheng¹  Po-Hsiang Chiu¹  Ming-Tsang Lee²  Kiyokazu Yasuda³ 

[1] Department of Materials Science and Engineering, National Chung Hsing University, Taichung 402, Taiwan;Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan;Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, Osaka 565-0871, Japan;

关键词: photonic sintering;    copper oxide;    copper salts;    hybrid paste;   

DOI  :  10.3390/nano11071864

来源: DOAJ

【 摘 要 】

Copper oxide particles of various sizes and constituent phases were used to form conductive circuits by means of photonic sintering. With the assistance of extremely low-energy-density xenon flash pulses (1.34 J/cm²), a mixture of nano/submicron copper oxide particles can be reduced in several seconds to form electrical conductive copper films or circuits exhibiting an average thickness of 6 μm without damaging the underlying polymeric substrate, which is quite unique compared to commercial nano-CuO inks whose sintered structure is usually 1 μm or less. A mixture of submicron/nano copper oxide particles with a weight ratio of 3:1 and increasing the fraction of Cu₂O in the copper oxide both decrease the electrical resistivity of the reduced copper. Adding copper formate further improved the continuity of interconnects and, thereby, the electrical conductance. Exposure to three-pulse low-energy-density flashes yields an electrical resistivity of 64.6 μΩ·cm. This study not only shed the possibility to use heat-vulnerate polymers as substrate materials benefiting from extremely low-energy light sources, but also achieved photonic-sintered thick copper films through the adoption of submicron copper oxide particles.

【 授权许可】

Unknown