期刊论文详细信息
Open Physics | |
Plasma treatment studies of MIS devices | |
Basa Deepak1  | |
[1] Department of Physics, Utkal University, Bhubaneswar, 751004, India; | |
关键词: silicon nitride; plasma nitridation; plasma oxidation; interface state density; elastic backscattering; | |
DOI : 10.2478/s11534-009-0095-8 | |
来源: DOAJ |
【 授权许可】
Unknown