Characteristics of phase delay in capacitive pick‐off circuits for MEMS resonators

Electronics Letters

Zhipeng Ma¹  Haibin Wu¹  Qiongxia Pang¹  Xudong Zheng¹  Zhonghe Jin¹  Yiyu Lin¹ 

[1] Micro‐Satellite Research Centre, School of Aeronautics and Astronautics, Zhejiang UniversityHangzhou310027People's Republic of China;

关键词: capacitive pick‐off circuits;    microelectromechanical systems resonators;    phase delay characteristics;    MEMS resonators;    analytical model;    modified double side‐band demodulation configuration;   

DOI  :  10.1049/el.2019.0277

来源: DOAJ

【 摘 要 】

In this Letter, the authors theoretically and experimentally investigate the characteristics of phase delay in capacitive pick‐off circuits for micro‐electromechanical systems (MEMS) resonators for the first time in history. An analytical model considering the phase delay for capacitive pick‐off circuits is built up in theory. Only when they use their proposed novel modified double side‐band demodulation configuration for resonators to extract motional amplitude and phase, the phase delay of pick‐off circuits can be eliminated and extracted meanwhile in real time. Experiments show that the changing feature of phase delay primarily depends on temperature rather than drive frequency. Experimental results agree well with the theoretical model and reveal the relatively high correlation between the phase delay and temperature. This work provides a new indicator of temperature for resonators, using this phase delay of the pick‐off interface, to make temperature compensation.

【 授权许可】

Unknown