Controlling Resonator Nonlinearities and Modes through Geometry Optimization

Micromachines

Nizar Jaber¹  Amal Z. Hajjaj² 

[1] Mechanical Engineering Department and the Centre for Communications Systems and Sensing, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia;Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough LE11 3TU, UK;

关键词: MEMS resonators;    nonlinearity tailoring;    geometry optimization;   

DOI  :  10.3390/mi12111381

来源: DOAJ

【 摘 要 】

Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response of MEMS resonators. Also, we explored active technique i.e., tuning the axial stress of the resonator. To achieve this, we propose a new hybrid shape combining a straight and initially curved microbeam. The Galerkin method is employed to solve the beam equation and study the effect of the different design parameters on the ratios of the frequencies and the nonlinearities of the structure. We show by adequately selecting the parameters of the structure; we can realize systems with strong quadratic or cubic effective nonlinearities. Also, we investigate the resonator shape effect on symmetry breaking and study different linear coupling phenomena: crossing, veering, and mode hybridization. We demonstrate the possibility of tuning the frequencies of the different modes of vibrations to achieve commensurate ratios necessary for activating internal resonance. The proposed method is simple in principle, easy to fabricate, and offers a wide range of controllability on the sensor nonlinearities and response.

【 授权许可】

Unknown