Advanced Electrode Design for Low-Voltage High-Speed Thin-Film Lithium Niobate Modulators

IEEE Photonics Journal

Zhiyong Li¹  Qingquan Wei¹  Zezheng Li¹  Xingrui Huang¹  Zhiguo Yu¹  Yang Liu¹  Huan Guan¹ 

[1] State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China;

关键词: Electro-optical systems;    optical interconnects;    waveguide devices;   

DOI  :  10.1109/JPHOT.2021.3066159

来源: DOAJ

【 摘 要 】

In this paper, we present a novel transmission line architecture in thin-film lithium niobate (TFLN) platforms to improve the velocity match between the microwave and the optical wave. Compared to conventional coplanar waveguide (CPW), the microwave index ($n_m$) of the proposed slotted electrodes can be optimized from 2.1 to 3 while maintaining the high modulation efficiency and 50-$\Omega$ impedance match. Equivalent-circuit model analysis and finite-element simulation are performed. The simulated half-wave voltage (V$_\pi$) of 1.2 V and E-O modulation bandwidth greater than 80 GHz is obtained for a 2-cm-long modulator. By utilizing the slotted slow-wave electrode, TFLN Mach-Zehnder modulators with CMOS-compatible operating voltage and 3-dB modulation bandwidth greater than 100 GHz are potentialized.

【 授权许可】

Unknown