Photonic Microcantilevers With Interferometric Bragg Grating Interrogation

IEEE Photonics Journal

James C. Gates¹  Christopher Holmes¹  Peter G. R. Smith¹  Lewis G. Carpenter²  Benjamin D. Snow² 

[1] Optoelectronic Research Centre, University of Southampton, Southampton , U.K.;Optoelectronic Research Centre, University of Southampton, Southampton, U.K.;

关键词: Micro and nano opto-electro-mechanical systems (MOEMS);    sensors;    waveguide devices;   

DOI  :  10.1109/JPHOT.2012.2210396

来源: DOAJ

【 摘 要 】

Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.

【 授权许可】

Unknown