Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

Micromachines

Md Abdullah Al Hafiz¹  Nouha Alcheikh²  Abdallah Ramini²  Mohammad I. Younis² 

[1] Computer, Electrical and Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia;Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia;

关键词: microresonators;    clamped–guided arch beams;    bi-directional electrostatic actuator;   

DOI  :  10.3390/mi8010014

来源: DOAJ

【 摘 要 】

We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural frequency to lower or higher values from its as-fabricated value. Several devices of various anchor designs and geometries are fabricated. We found that for the fabricated shallow arches, the effect of the curvature of the arch is less important compared to the induced axial stress from the axial load. We have shown that the first mode resonance frequency can be increased up to twice its initial value. Additionally, the third mode resonance frequency can be increased up to 30% of its initial value. These results can be promising as a proof-of-concept for the realization of wide-range tunable microresonators. The experimental results have been compared to finite-element simulations, showing good agreement among them.

【 授权许可】

Unknown