Micromachined Resonators: A Review

Micromachines

Frederic Nabki¹  Reza Abdolvand²  Behraad Bahreyni³  Joshua E. -Y. Lee⁴ 

[1] Department of Electrical Engineering, École de Technologie Supeérieure, Montreal, QC H3C 1K3, Canada;Dynamic Microsystems Lab, Department of Electrical and Computer Engineering, University of Central Florida, Orlando, FL 32816, USA;School of Mechatronic Systems Engineering, Simon Fraser University, Surrey, BC V3T 0A3, Canada;State Key Laboratory of Millimeter Waves, City University of Hong Kong, Kowloon, Hong Kong, China;

关键词: resonance;    microresonators;    micro-electro-mechanical systems;   

DOI  :  10.3390/mi7090160

来源: DOAJ

【 摘 要 】

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

【 授权许可】

Unknown