Sequential Atmospheric Pressure Plasma-AssistedLaser Ablation of Photovoltaic Cover Glass for ImprovedContour Accuracy

Micromachines

Wolfgang Viöl¹  Maximilian Dammann¹  Stephan Wieneke¹  Christoph Gerhard¹ 

[1] Laboratory of Laser and Plasma Technologies, University of Applied Sciences and Arts,Von-Ossietzky-Straße 99, 37085 Göttingen, Germany;

关键词: atmospheric pressure plasma;    laser ablation;    hybrid ablation;    photovoltaic glass;    contour accuracy;   

DOI  :  10.3390/mi5030408

来源: DOAJ

【 摘 要 】

In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses.

【 授权许可】

Unknown