Micromachines | |
Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy | |
Christoph Gerhard1  Maximilian Dammann1  Stephan Wieneke1  | |
[1] Laboratory of Laser and Plasma Technologies, University of Applied Sciences and Arts, Von-Ossietzky-Straße 99, 37085 Göttingen, Germany; E-Mails: | |
关键词: atmospheric pressure plasma; laser ablation; hybrid ablation; photovoltaic glass; contour accuracy; | |
DOI : 10.3390/mi5030408 | |
来源: mdpi | |
【 摘 要 】
In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses.
【 授权许可】
CC BY
© 2014 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190024137ZK.pdf | 1039KB | download |