ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Sensors

Cristian Viespe¹  Izabela Constantinoiu¹ 

[1] National Institute for Laser, Plasma and Radiation Physics, Laser Department, Atomistilor 409, 077125 Magurele, Romania;

关键词: surface acoustic wave;    gas;    sensor;    metal oxide semiconductor;    ZnO;   

DOI  :  10.3390/s20185118

来源: DOAJ

【 摘 要 】

Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.

【 授权许可】

Unknown