A Rapid Prototyped Thermal Mass Flowmeter

Sensors

Borut Pečar¹  Danilo Vrtačnik¹  Matic Pavlin¹  Matej Možek¹ 

[1] Laboratory of Microsensor Structures and Electronics, Faculty of Electrical Engineering, University of Ljubljana, Tržaška 25, SI-1000 Ljubljana, Slovenia;

关键词: thermal mass flowmeter;    rapid prototyping;    COMSOL;    numerical simulation;    calorimetric;    hot wire;   

DOI  :  10.3390/s21165373

来源: DOAJ

【 摘 要 】

An innovative rapid prototyping technique for embedding microcomponents in PDMS replicas was developed and applied on a thermal mass flowmeter for closed loop micropump flowrate control. Crucial flowmeter design and thermal parameters were investigated with a 3-D fully coupled electro-thermal-fluidic model which was built in Comsol Multiphysics 5.2. The flowmeter was characterized for three distinct measuring configurations. For precise low flowrate applications, a sensor-heater-sensor flowmeter configuration with a constant heater temperature was found to be the most appropriate yielding the measuring range of 0 to 90 µL·min⁻¹ and the sensitivity of 1.3 °C·µL⁻¹·min in the lower flowrate range of 0 to 40 µL·min⁻¹.

【 授权许可】

Unknown