Towards Integrated Mid-Infrared Gas Sensors

Sensors

Daniel Popa¹  Florin Udrea¹ 

[1] Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK;

关键词: gas sensors;    mid-infrared;    integrated sensors;    MEMS;    CMOS;   

DOI  :  10.3390/s19092076

来源: DOAJ

【 摘 要 】

Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

【 授权许可】

Unknown