A Laser-Machined Stainless-Steel Micro-Scanner for Confocal Microscopy

Proceedings

M. A. Icel¹  H. A. Oyman¹  B. C. Efe¹  A. D. Yalcinkaya¹  Y. D. Gokdel²  O. Ferhanoglu³ 

[1] Department of Electrical & Electronics Eng. Bebek, Bogazici University, 34342 Istanbul, Turkey;Department of Electrical & Electronics Eng. Eyup, Istanbul Bilgi University, 34060 Istanbul, Turkey;Department of Electronics & Communication Eng. Maslak, Istanbul Technical University, 34469 Istanbul, Turkey;

关键词: laser-machined;    confocal microscopy;    micro-scanner;    magnetic actuation;   

DOI  :  10.3390/proceedings1040564

来源: DOAJ

【 摘 要 】

A stainless-steel based micro-scanner with magnetic actuation is fabricated via laser-cutting technology targeted for confocal microscopy. Laser cutting offers low-cost and high speed fabrication of such scanners. The device is designed to establish a 2D Lissajous pattern. For a coil drive of 180 mA, fabricated scanner is able to deliver 4 degrees of optical scan angle for both slow scan and fast scan axes at 663 Hz and 2211 Hz, respectively. Fabricated mirror is integrated into a confocal microscopy setup and tested with the United States Air Force target accomplishing a 200 μm × 200 μm field of view and sub 10 μm resolution. With further improvement, our scanner will contribute to manufacturing of low-cost and compact scanning microscopy technologies.

【 授权许可】

Unknown