Proceedings | |
Towards 3D Confocal Imaging with Laser-Machined Micro-Scanner | |
Gokdel, Yigit Daghan1  Oyman, Hilmi Artun2  Efe, Baris Can3  Icel, Mustafa Akin4  Ferhanoglu, Onur5  | |
[1] Author to whom correspondence should be addressed.;Department of Electrical & Electronics Eng. Bebek, Bogazici University, 34342 Istanbul, Turkey;Department of Electrical & Electronics Eng. Eyup, Istanbul Bilgi University, 34060 Istanbul, Turkey;Department of Electronics & Communication Eng. Maslak, Istanbul Technical University, 34469 Istanbul, Turkey;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9â12 September 2018 | |
关键词: laser-machined; confocal microscopy; micro-scanner; magnetic actuation; 3D imaging; Lissajous scan; stainless steel; | |
DOI : 10.3390/proceedings2131067 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
A micro-scanner made of stainless-steel is fabricated via laser cutting technology for 3D Lissajous confocal imaging. The multi-gimbaled structure of the device provides two orthogonal torsional modes and three different out-of-plane modes. Torsional modes can be used to achieve 2D scan and all of the out-of-plane modes can be used in changing the focus of the micro-scanner to achieve a 3D scanning pattern. One of the out-of-plane modes along with two orthogonal torsional modes can be employed for scanning a large depth-stack in sparse fashion while another out-of-plane mode can satisfy a much higher scan fill-rate with less field of view (FOV). Simulations of the micro-scanner are obtained using finite element method (FEM) software and compared with the characterization data gathered from Laser Doppler Vibrometer (LDV). Using various out-of-plane modes, the constructed fill patterns are simulated on MATLAB and fill rates compared.
【 授权许可】
CC BY
【 预 览 】
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RO201910256837244ZK.pdf | 791KB | download |