Towards 3D Confocal Imaging with Laser-Machined Micro-Scanner

Proceedings

Gokdel, Yigit Daghan¹  Oyman, Hilmi Artun²  Efe, Baris Can³  Icel, Mustafa Akin⁴  Ferhanoglu, Onur⁵ 

[1] Author to whom correspondence should be addressed.;Department of Electrical & Electronics Eng. Bebek, Bogazici University, 34342 Istanbul, Turkey;Department of Electrical & Electronics Eng. Eyup, Istanbul Bilgi University, 34060 Istanbul, Turkey;Department of Electronics & Communication Eng. Maslak, Istanbul Technical University, 34469 Istanbul, Turkey;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: laser-machined;    confocal microscopy;    micro-scanner;    magnetic actuation;    3D imaging;    Lissajous scan;    stainless steel;   

DOI  :  10.3390/proceedings2131067

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A micro-scanner made of stainless-steel is fabricated via laser cutting technology for 3D Lissajous confocal imaging. The multi-gimbaled structure of the device provides two orthogonal torsional modes and three different out-of-plane modes. Torsional modes can be used to achieve 2D scan and all of the out-of-plane modes can be used in changing the focus of the micro-scanner to achieve a 3D scanning pattern. One of the out-of-plane modes along with two orthogonal torsional modes can be employed for scanning a large depth-stack in sparse fashion while another out-of-plane mode can satisfy a much higher scan fill-rate with less field of view (FOV). Simulations of the micro-scanner are obtained using finite element method (FEM) software and compared with the characterization data gathered from Laser Doppler Vibrometer (LDV). Using various out-of-plane modes, the constructed fill patterns are simulated on MATLAB and fill rates compared.

【 授权许可】

CC BY