Enhancement of Life Time of the Dimensionally Stable Anode for Copper Electroplating Applications

Archives of Metallurgy and Materials

卷:62

Lee Man Seung¹  Son Seong Ho²  Park Sung Cheol² 

[1] Department of Advanced Material Science and Engineering, Mokpo National University, Chonnam, Korea;

[2] Surface Treatment R&D Group, Korea Institute of Industrial Technology, Incheon, Korea;

关键词: Dimensionally Stable Anode;    Surface treatment;    Life time;    Copper;    Electrodeposition;   

DOI  :  10.1515/amm-2017-0145

来源: DOAJ

【 摘 要 】

In order to enhance the long-term stability of DSA for copper electroplating process, in the present study, noble metal oxides with excellent electrochemical properties was used and optimum condition was determined the ratio of noble metal oxides, surface pre-treatment of titanium substrate and heat treatment. The effect of the surface pretreatment of titanium substrate and ratio of noble metal oxides were estimated by accelerated test at the highly current density conditions. The lifetime of DSA increase six-fold higher as the oxide thickness of Ta 7 : Ir 3 composition ratio. Under the optimal condition, surface pretreatment led to dramatic increase in the lifetime of DSA.

【 授权许可】

Unknown