Impact of Surface Roughness on Ion-Surface Interactions Studied with Energetic Carbon Ions 13C on Tungsten Surfaces+

Condensed Matter

卷:4

Andrey Litnovsky¹  Albert Hiller¹  HansRudolf Koslowski¹  Martin Köppen²  Maren Hellwig²  RogerA.De Souza³  Christian Schwab³  Klaus Schmid⁴ 

[1] Forschungszentrum Jülich GmbH, Institut für Energie—und Klimaforschung—Plasmaphysik, 52428 Jülich, Germany;

[2] Independent researchers, Heinersdorfer Str. 52, 13086 Berlin, Germany;

[3] Institut für Physikalische Chemie, RWTH Aachen University, Landoltweg 2, 52074 Aachen, Germany;

[4] Max-Planck-Institut für Plasmaphysik, Boltzmannstraße 2, 85748 Garching, Germany;

关键词: roughness;    ion-surface interaction;    angular distribution;    reflection;    physical sputtering;    deposition;    sticking;    plasma-wall interaction;    secondary ion mass spectrometry;    nuclear reaction analysis;    SDTrimSP;   

DOI  :  10.3390/condmat4010029

来源: DOAJ

【 摘 要 】

The effect of surface roughness on angular distributions of reflected and physically sputtered particles is investigated by ultra-high vacuum (UHV) ion-surface interaction experiments. For this purpose, a smooth (R a = 5.9 nm) and a rough (R a = 20.5 nm) tungsten (W) surface were bombarded with carbon ions 13C+ under incidence angles of 30 ∘ and 80 ∘. Reflected and sputtered particles were collected on foils to measure the resulting angular distribution as a function of surface morphology. For the qualitative and quantitative analysis, secondary ion mass spectrometry (SIMS) and nuclear reaction analysis (NRA) were performed. Simulations of ion-surface interactions were carried out with the SDTrimSP (Static Dynamic Transport of Ions in Matter Sputtering) code. For rough surfaces, a special routine was derived and implemented. Experimental as well as calculated results prove a significant impact of surface roughness on the angular distribution of reflected and sputtered particles. It is demonstrated that the effective sticking of C on W is a function of the angle of incidence and surface morphology. It is found that the predominant ion-surface interaction process changes with fluence.

【 授权许可】

Unknown