Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography

Materials

卷:10

Saulius Juodkazis¹  Danas Sakalauskas²  Lina Mikoliūnaitė²  Simas Šakirzanovas²  Darius Gailevičius³  Mangirdas Malinauskas³  Linas Jonušauskas³ 

[1] Center for Micro-Photonics, Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn 3122, Australia;

[2] Department of Applied Chemistry, Vilnius University, Naugarduko Str. 24, Vilnius LT-03225, Lithuania;

[3] Department of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, Vilnius LT-10223, Lithuania;

关键词: direct laser writing;    ultrafast laser;    3D laser lithography;    3D printing;    hybrid polymer;    integrated micro-optics;    optical damage;    photonics;    pyrolysis;    ceramic 3D structures;   

DOI  :  10.3390/ma10010012

来源: DOAJ

【 摘 要 】

We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm2 intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures.

【 授权许可】

Unknown