Promising solutions for automating measurement methods in nanometric range

Технічна інженерія

卷:2

关键词: nanomaterials;    nanometrology;    dimensional measurements;    automation;    software;   

DOI  :  10.26642/ten-2021-2(88)-50-54

来源: DOAJ

【 摘 要 】

The article notes that nanometrology is an integral component of nanofabrication, and the global nanomaterials market is actively developing and its capacity in 2019 is estimated at $8.5 billion. The global nanomaterials market is actively developing, and its capacity is estimated at $8.5 billion in 2019, with a growth prospect of 13,1 % in the period up to 2027. At the same time new promising nanotechnologies and nanomaterials are created. And this requires the development of the system of nanometrology. It is considered that the system of nanoproduction-nanotechnology should solve the following tasks: smart measurements by numerical control (NC) with built-in minicomputer; offline or on-line programming of NC measuring tools with built-in minicomputer; automated replacement of workpieces and products; automated replacement of probes and sensors; automated evaluation of measurement results. A large range of electron microscopes has been developed and used worldwide to evaluate the geometry of nanoproducts. However, the development of nanotechnology requires equipping them with automated systems and appropriate software. An experimental automated device (interference profilometer) and software for non-contact measurement of micro- and nanotopography of a product surface, its three-dimensional representation, determination of roughness parameters and scanning parameters were created. An automated measurement and control system for atomic force microscopy (AFM) was developed, which has an improved control unit of laser beam positioning systems on the AFM probe. One of the directions of automation of linear measurements in nanometrology is the use of comparison standards, and this requires a corresponding adjustment of state standards of nanometrology. The analysis of published materials indicates certain positive results in the automation of nanoscale measurements in the nanofabrication environment. However, it is obvious that this direction of activity requires increased funding and new ideas to ensure the competitiveness of nanoproducts.

【 授权许可】

Unknown