Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophone

International journal of metrology and quality engineering

article

Xiaoyong Zhang¹  Nixin Shen¹  Qingda Xu⁴  Yu Pei¹  Yuqi Lian¹  Weidong Wang¹  Guojun Zhang¹  Wendong Zhang¹ 

[1]State Key Laboratory of Dynamic Testing Technology

[2]Department of Intelligence and Automation, Taiyuan University

[3]Nanjing North Information Industrialization Group Co., Ltd.

[4]Shanghai Jiao Tong University

关键词: Vector hydrophone;    sensitivity;    bionics;    neuromasts;   

DOI  :  10.1051/ijmqe/2021002

学科分类：土木及结构工程学

来源: EDP Sciences

【 摘 要 】

Inspired from fish bionics, an anulus-shaped ciliary structure for four-unit MEMS vector hydrophone (AFUVH) is proposed in this paper. It replaces the previous bionic cilium-shaped structure and becomes a novel sensing structure in the four-unit MEMS vector hydrophone (FUVH), which realizes the complete simulation of the fish lateral line neuromasts structurally and functionally. It not only improves the sensitivity of FUVH, but also retains a sufficient bandwidth, which improves the overall performance of FUVH for monitoring remote ships noise. Meanwhile, this paper theoretically analyzes the performance of AFUVH for detecting acoustic signals. ANSYS 17.0 simulation is used to derive the parameters of effective structure and optimum dimension structure of annulus-shaped ciliary structure. Finally, the experimental results show that comparing with cilium-structured FUVH, the sensitivity of AFUVH with effective structure is increased by 3.92dB, and the sensitivity of AFUVH with optimum dimension structure is increased by 5.87dB, reaching up to −177.53 dB.

【 授权许可】

CC BY