Design and fabrication of hollow out-of-plane silicon microneedles

Micro & nano letters

article

Petr Jurčíček¹  Helin Zou¹  Shuiping Zhang¹  Chong Liu¹ 

[1] Research Center for Micro System Technology (MST), Dalian University of Technology

关键词: elemental semiconductors;    microfluidics;    pipe flow;    Poiseuille flow;    semiconductor growth;    silicon;    sputter etching;    hollow out-of-plane silicon microneedle design;    hollow out-of-plane silicon microneedle fabrication;    mosquito mouthpart function;    mosquito mouthpart dimensions;    two-step etching;    deep reactive ion etching;    lateral smoothness;    {411} exterior crystal planes;    anisotropic etching;    water-bath temperature;    shank height;    needle borehole diameter;    flow rate tests;    inner diameter;    Hagen-Poiseuille law;    pig skin;    microelectromechanical system;    painless transdermal drug delivery systems;    temperature 87 degC;    size 100 mum to 120 mum;    size 10 mum to 25 mum;    Si;   

DOI  :  10.1049/mnl.2012.0903

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

This work shows a testing tool used in Fundamentals of Programming II laboratory in Telecommunication Technologies Engineering Degree at University of Sevilla to check the student project. This tool allows students to test the proper operation of their project in autonomous way. This is a flexible and useful tool for testing the project because the tool identifies when the student has carried out a project that meet the given specifications of the project. This implies a high rate of success when the student delivers its project.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND