Enhanced sensitivity with extended linearity in MEMS piezoresistive pressure sensor

Micro & nano letters

article

Muthapillai Rajavelu¹  Dhakshnamoorthy Sivakumar¹  Joseph Daniel Rathnam¹  Koilmani Sumangala² 

[1] NPMaSS MEMS Design Centre, Department of Electronics and Instrumentation Engineering, Annamalai University;Department of Civil and Structural Engineering, Annamalai University

关键词: bending;    bridge circuits;    diaphragms;    microsensors;    piezoresistive devices;    pressure sensors;    pressure transducers;    stress analysis;    MEMS piezoresistive pressure sensor;    sensitivity enhancement;    geometry;    diaphragm material;    piezoresistors;    bending stress;    transduction process;    dual Wheatstone bridge;    YY plane stress;    XX plane stress;    pressure 0 kPa to 54 kPa;    size 3 mum to 5 mum;    size 7 mum;   

DOI  :  10.1049/mnl.2013.0496

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

William Syndrome (WS) is a rare genetic condition related to deletion of elastin gene resulting in distinctive facies, cardiovascular diseases, learning difficulties, developmental delay, unique personality characteristics, endocrine involvement, etc.1 Although successful anaesthesia is reported, literature review indicate significant major adverse cardiac events (MACE) including sudden death, as frequent.2 So anaesthetic management of these patients has proved to be challenging. The cardiovascular abnormality, corrected QT, and cardio-depressant actions of anaesthetic drugs need critical considerations.

【 授权许可】

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