Bottom-inlet-type micro-electro-mechanical system acoustic sensors based on two polyimide/amorphous-Si sacrificial layers

Micro & nano letters

article

Jaewoo Lee¹  Changhan Je¹  Yi-Gyeong Kim¹  Sung Q Lee¹  Woo-Seok Yang¹  Sang-Gug Lee² 

[1] Nano Sensor Lab, Electronics and Telecommunications Research Institute;Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

关键词: equivalent circuits;    acoustic devices;    microsensors;    diaphragms;    etching;    silicon;    bottom inlet type microelectromechanical system;    acoustic sensors;    polyimide-amorphous silicon sacrificial layers;    diaphragm;    fundamental CMOS process;    isotropic etching;    open circuit sensitivity;    structure based equivalent circuit modelling;    frequency 100 Hz to 16 kHz;    voltage 9.2 V;   

DOI  :  10.1049/mnl.2014.0381

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Objective: Radio frequency thermocoagulation (RFT) is a relatively new modality and has been recommended for treatment of back pain diagnosed as to be originating from spinal facet joints. We aimed to evaluate the efficacy of this novel procedure in our patients with lumbar facet syndrome in our department of algology. Methodology: In this retrospective, observational study, the medical records of 493 lumbar facet syndrome patients treated using RFT in 2008-2013, were reviewed. All data were obtained from the pain evaluation cards in the patient files and recorded. Data of age, sex, visual analog scale (VAS) scores before and after the therapy and satisfaction scores after the therapy were recorded from medical records of the patients. Visual analogue scale (VAS) pain scores, daily activities (1= poor to 4 = very good) and satisfaction scores (1= poor to 4 = excellent) before the procedure and at the day 1, day 2, and then at one week, 2 weeks, one month, 6 months and 12 months following the procedure, were reviewed and recorded. Results: Mean VAS score before the therapy was 8.03 ± 1.06, one month after the therapy it was significantly reduced and 6 months after the therapy it was found as 2.18 ± 0.76. The satisfaction scores were found significantly higher after therapy. Data of movement scores were found higher after the therapy than the scores before therapy. No complication was noted in any of the patient.

【 授权许可】

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