Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding

Micro & nano letters

article

Loïc Jacot-Descombes¹  Maurizio Rosario Gullo¹  Massimo Mastrangeli¹  Victor Javier Cadarso¹  Jürgen Brugger¹ 

[1] Microsystems Laboratory

关键词: elemental semiconductors;    silicon;    surface tension;    ink jet printing;    inkjet printed SU-8 hemispherical microcapsules;    planar lithography techniques;    microdevice fabrication;    hemispherical shapes;    drop-on-demand inkjet printing technique;    photocurable ink;    fabrication approach;    surface tension;    ink volume delivery;    geometrically-patterned silicon substrates;    controlled fabrication;    open half capsules;    inner cavity volumes;    printing yield;    microcapsule embedding silicon microchip fabrication;    liquid controlled encapsulation;    smart microsystems;    size 100 mum;    Si;   

DOI  :  10.1049/mnl.2013.0241

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Background & Objectives: COVID-19 has spread around the globe, and our country is no exception. We have been actively observing and managing these patients and have recorded the salient features including risk factors, the presenting complaints and also the trends of mortality.

【 授权许可】

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