Temperature-dependence improvement for a MEMS gyroscope using triangular-electrode based capacitive detection method

Micro & nano letters

article

Yiyu Lin¹  Xudong Zheng¹  Siqi Liu¹  Wei Ma¹  Zhonghe Jin¹ 

[1] Micro-Satellite Research Center, Zhejiang University

关键词: microsensors;    gyroscopes;    capacitive sensors;    amplitude modulation;    electrochemical electrodes;    temperature-dependence improvement;    microelectromechanical systems;    triangular-electrode based capacitive detection method;    MEMS gyroscopes;    TEB capacitive detection method;    scale factors;    zero-rate outputs;    linear electromechanical amplitude modulation method;    Allan variance analysis;    bias instability;    angle random walk;    vacuum-packaged gyroscope;   

DOI  :  10.1049/mnl.2017.0431

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Medical Informatics comprises the theoretical and practical aspects of information processing and communication, based on knowledge and experience derived from processes in medicine and healthcare. Theprocessing takes place within computers ranging from large supercomputers for research, high-performance work stations for image processing and retrieval to smartphones which support mobility and pervasive health applications. A variety of Operating Systems are used,dominated by Microsoft and Linux. The latter promotes an 'open source' approach, which is favoured by many in health. In today's 'connected health' paradigm, end-user devices are linked to hospital servers, each other and the Internet. This requires knowledge and understanding of security considerations which are important in this disciple, due to the ethical dimension of healthcare.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND