GaN LEDs fabricated using SF 6 plasma RIE

Micro & nano letters

article

Wasif Khan¹  Xiaopeng Bi¹  Bin Fan¹  Wen Li¹ 

[1] Department of Electrical and Computer Engineering, Michigan State University

关键词: surface roughness;    wide band gap semiconductors;    etching;    gallium compounds;    light emitting diodes;    sputter etching;    III-V semiconductors;    annealing;    etch rates;    surface roughness;    optical intensity;    fabricated LED;    post-fabrication annealing;    GaN LEDs;    cost-effective fabrication method;    gallium nitride light;    conventional reactive-ion etching system;    RIE;    radio-frequency power;    reactive-ion etching system;    GaN;   

DOI  :  10.1049/mnl.2018.5083

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

The aim of the present investigation was to develop a microsponge delivery system of acyclovir to control its release when applied topically thereby reducing dosing frequency and enhancement patient compliance. The microsponges were produced by the oil in oil emulsion solvent diffusion method. The effect of different formulation and process variables such as internal phase volume, polymer type, drug-polymer ratio, stirring speed and stirring duration on microsponge production yield, loading efficiency, particle size and in-vitro drug release was evaluated. The result showed that the microsponge F2 prepared from Eudrajet RS polymer had optimum physical properties regarding the loading efficiency of 99.71_+ 0.7% and production yield which was 85%. Also, F2 showed 66% drug release within 8 hours. Accordingly, the oil in oil emulsion solvent diffusion method is an effective technique to formulate microsponges with maximum production yield and loading efficiency for acyclovir.

【 授权许可】

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