Eliminate the transmission feedthrough of thermal-piezoresistive I 2 -BAR MEMS resonators based on reverse-biased PN junction

Micro & nano letters

article

Zhuang Xiong¹  Zhaoyun Zhang¹  Li Zhang¹  He Yang¹ 

[1] Institute of Electronic Engineering, China Academy of Engineering Physics

关键词: piezoresistive devices;    microsensors;    micromechanical resonators;    p-n junctions;    silicon;    elemental semiconductors;    microfabrication;    silicon-on-insulator;    thermally driving sensing;    piezoresistive sensing signals;    p-type silicon-on-insulator wafer;    locally doped n-type regions;    thermal driving current;    p-type layer;    n-type layer;    integrated thermal driving;    piezoresistive sensing transductions;    reverse-biased PN junction;    piezoresistive sensing;    transmission feedthrough elimination;    thermal-piezoresistive I2-BAR MEMS resonators;    gain 50.0 dB;    Si;   

DOI  :  10.1049/mnl.2017.0774

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Abstract A sensitive, precise and reliable indirect spectrophotometric method for the determination of chlordiazepoxide (CDE) in pure and pharmaceutical dosage forms is described. The method is based on oxidative coupling reaction between amino group resulting from acidic decomposition of CDE with phenothiazine in the presence of sodium periodate to produce an intense green soluble dye that is stable and shows a maximum absorption at 602 nm. The calibration plot indicates that Beer’s law is obeyed over the concentration range of 0.1?50 µg/mL, with a molar absorptivity of 1×104 L/mol cm and correlation coefficient of 0.9994.All the conditions that affecting on the stability and sensitivity of the formed product were studied and optimized and the suggested method was effectively applied for the determination of CDE in commercial dosage forms.

【 授权许可】

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