Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge

Materials Research

Natália De Freitas Daudt¹  Júlio César Pereira Barbosa²  Marina De Oliveira Cardoso Macêdo¹  Marcelo Barbalho Pereira²  Clodomiro Alves Junior¹ 

[1] ,Universidade Federal do Rio Grande do Norte Programa de Pós-graduação em Ciência e Engenharia dos Materiais Natal RN ,Brazil

关键词: cathodic cage;    thin films;    titanium nitride;    Optical Emission Spectroscopy;    plasma deposition;    optical properties;   

DOI  :  10.1590/S1516-14392013005000065

来源: SciELO

【 摘 要 】

Cathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.

【 授权许可】

CC BY   
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